Scrubber System

GPS
Scrubber
PS-200

Plasma Type Scrubber

·High temperature thermal equilibrium plasma system.

·High decomposition efficiency of PFCs gas. (more than 99%)

·Minimize maintenance time with modular structure.

Model PS-200
Total Capacity Max. 300 LPM
Inflow Capa. (with N2 Purge) Etch(CF4) 150LPM
CVD, Diffusion (Others) 300 LPM
Dimension 800(W) x 900(D) x 1800(H)
Target Process Etch, CVD, Diffusion, Etc.

GPS
Scrubber
HW - 300

Heat-Wet Type Scrubber

·Processing of flammable and water-soluble gas using high-temperature heater.

·Dry system : applying a system to minimize water exhaust.

·Low operating cost compared to burn or plasma type.

Model HW-300
Total Capacity Max. 300 LPM
Inflow Capa. (with N2 Purge) CVD, Diffusion(Others) 600 LPM
Dimension 800(W) x 850(D) x 1800(H)
Target Process CVD, Diffusion, Etc.

GPS
Scrubber
HPS-1000

Hybrid Type Scrubber

·Hybrid plasma system. (Plasma + Burn)

·High decomposition efficiency of PFCs gas. (more than 99%)

·Minimize maintenance time with modular structure.

·Capable of processing large-capacity PFCs gas.

Model HPS-1000
Total Capacity Max. 1,000 LPM
Inflow Capa. (with N2 Purge) Etch (CF4) 300 LPM
CVD, Diffusion (Others) 1,000 LPM
Dimension 1600(W) x 900(D) x 1800(H)
Target Process Etch, CVD, Diffusion, Etc.