Model | PS-200 |
---|---|
Total Capacity | Max. 300 LPM |
Inflow Capa. (with N2 Purge) | Etch(CF4) 150LPM CVD, Diffusion (Others) 300 LPM |
Dimension | 800(W) x 900(D) x 1800(H) |
Target Process | Etch, CVD, Diffusion, Etc. |
Scrubber System
GPS
Scrubber
PS-200
Plasma Type Scrubber
¡¤High temperature thermal equilibrium plasma system.
¡¤High decomposition efficiency of PFCs gas. (more than 99%)
¡¤Minimize maintenance time with modular structure.

GPS
Scrubber
HW - 300
Heat-Wet Type Scrubber
¡¤Processing of flammable and water-soluble gas using high-temperature heater.
¡¤Dry system : applying a system to minimize water exhaust.
¡¤Low operating cost compared to burn or plasma type.

GPS
Scrubber
HPS-1000
Hybrid Type Scrubber
¡¤Hybrid plasma system. (Plasma + Burn)
¡¤High decomposition efficiency of PFCs gas. (more than 99%)
¡¤Minimize maintenance time with modular structure.
¡¤Capable of processing large-capacity PFCs gas.
